Electronic device test apparatus
US8749255B2 · kind B2 · utility
1Cited by
4References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2011 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Dec 10, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0483
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electronic device test apparatus which can optimize throughput and costs is provided.An electronic device test apparatus 1 comprises: a test cell cluster 10 having cell groups 11A to 11H each of which has a plurality of test cells 20; and a conveyor apparatus 30 supplying test carriers to a plurality of the test cells 20, and each of the test cell 20 has: contactors 215; a flow path 221 connected to a vacuum pump 25 and reducing pressure in a recess 211 of a pocket 21 so as to bring external terminals 73 and the contactors 215 into contact; and a test circuit for running a test on an electronic circuit formed into a die 90.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.