Methods and apparatus for pressure compensation in a mass flow controller
US8751180B2 · kind B2 · utility
15Cited by
83References
15Claims
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Key dates
| Filing date | Sep 18, 2008 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Jan 10, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.