Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
US8752449B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 8, 2008 |
| Grant date | Jun 17, 2014 |
| Priority date | — |
| Expiry date | Jul 14, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20329
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.