Charged particle beam drawing apparatus and method of manufacturing article
US8754382B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2012 |
| Grant date | Jun 17, 2014 |
| Priority date | — |
| Expiry date | Sep 21, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24514
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A drawing apparatus includes: a detector configured to output a current in accordance with a pulse of a charged particle beam; and a processor including a capacitor and configured to detect a value of a voltage of the capacitor and to obtain an intensity of the pulse based on a value of a capacitance of the capacitor and the detected voltage value. The processor is configured to detect a current output from the detector in accordance with a charged particle beam incident thereon through a voltage drop, to supply a current having a value determined based on the detected current, to the capacitor to detect a value of a voltage of the capacitor, and to obtain the value of the capacitance based on the determined current value and the detected value of the voltage of the capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.