Yoshikiyo Yui
22Patents
9h-index
22Co-inventors
75Inventor score
Filing activity: Mar 24, 1986 → Apr 22, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6835937B1 | Correcting method for correcting exposure data used for a charged particle beam exposure system | Electricity | 39 | Expired |
| US5053614A | Exposure control method and apparatus compensating for detection of offset from a measured value | Physics | 30 | Expired |
| US5107275A | Exposure control system | Electricity | 29 | Expired |
| US6483120B1 | Control system for a charged particle exposure apparatus | Physics | 25 | Expired |
| US6515409B2 | Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method | Electricity | 22 | Expired |
| US6593686B1 | Electron gun and electron beam drawing apparatus using the same | Electricity | 21 | Expired |
| US6667486B2 | Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same | Electricity | 17 | Expired |
| US4714331A | Method and apparatus for automatic focusing | Physics | 11 | Expired |
| US6777697B2 | Charged-particle beam exposure apparatus and device manufacturing method using the same | Electricity | 10 | Expired |
| US6455211B1 | Pattern transfer method and apparatus, and device manufacturing method | Physics | 9 | Expired |
| US6559463B2 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Electricity | 8 | Expired |
| US6466301B1 | Transfer apparatus and transfer method | Electricity | 7 | Expired |
| US6903352B2 | Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method | Electricity | 7 | Expired |
| US7067830B2 | Multi-electron beam exposure method and apparatus | Electricity | 7 | Expired |
| US6741732B2 | Exposure method and device manufacturing method using this exposure method | Electricity | 4 | Expired |
| US7126140B2 | Multi-electron beam exposure method and apparatus | Electricity | 3 | Expired |
| US6992307B2 | Electron beam source and electron beam exposure apparatus employing the electron beam source | Electricity | 2 | Expired |
| US4713675A | Exposure apparatus | Physics | 2 | Expired |
| US7608844B2 | Charged particle beam drawing apparatus | Electricity | 1 | Expired |
| US8754382B2 | Charged particle beam drawing apparatus and method of manufacturing article | Electricity | 1 | Active |
| US12324651B2 | Acoustic-wave measuring device, matching-material bag, matching gel, separation film, and acoustic-wave measurement method | Physics | 0 | Active |
| US8716672B2 | Charged particle optical system, drawing apparatus, and method of manufacturing article | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.