Systems and method for laser voltage imaging state mapping
US8754633B2 · kind B2 · utility
5Cited by
77References
11Claims
0Family size
Assignee
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Key dates
| Filing date | May 3, 2010 |
| Grant date | Jun 17, 2014 |
| Priority date | — |
| Expiry date | Jan 12, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/283
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for laser probing of a DUT is disclosed. The system enables laser voltage imaging state mapping of devices within the DUT. A selected area of the DUT is illuminating a while the DUT is receiving test signals causing certain of the active devices to modulate. Light reflected from the DUT is collected and is converted into an electrical signal. Phase information is extracting from the electrical signal and a two-dimensional image is generated from the phase information, wherein the two-dimensional image spatially correlates to the selected area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.