Method and device using rotating printing arm to project or view image across a workpiece

US8755590B2 · kind B2 · utility

Assignee

• Micronic Laser Systems AB · SE

Inventors

• Torbjorn Sandstrom · Mölnlycke, SE
• Sten Lindau · Täby, SE

Key dates

• Filing date: May 13, 2013
• Grant date: Jun 17, 2014
• Expiry date: May 13, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/704
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The technology disclosed relates to scanning of large flat substrates for reading and writing images. Examples are flat panel displays, PCB's and photovoltaic panels. Reading and writing is to be understood in a broad sense: reading may mean microscopy, inspection, metrology, spectroscopy, interferometry, scatterometry, etc. of a large workpiece, and writing may mean exposing a photoresist, annealing by optical heating, ablating, or creating any other change to the surface by an optical beam. In particular, we disclose a technology that uses a rotating or swinging arm that describes an arc across a workpiece as it scans, instead of following a traditional straight-line motion.