Vacuum pump for differentially pumping multiple chambers
US8757987B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2010 |
| Grant date | Jun 24, 2014 |
| Priority date | — |
| Expiry date | Sep 9, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/24
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A differentially pumped mass spectrometer system comprises a mass spectrometer having first and second pressure chambers through which, during use, ions are conveyed along a path. A pump assembly for differentially evacuating the chambers is attached to the mass spectrometer. The pump assembly comprises a housing attached to the mass spectrometer and a cartridge inserted into the housing. The cartridge has a plurality of inlets each for receiving fluid from a respective pressure chamber and a pumping mechanism for differentially pumping fluid from the chambers. The cartridge is inserted into the housing such that the pumping mechanism is inclined relative to the ion path, but with the cartridge protruding into the mass spectrometer to such an extent that at least one of the inlets at least partially protrudes into its respective chamber without crossing the ion path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.