Ring light source system for interferometer with adjustable ring radius and ring radial width
US8764241B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2012 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | Jan 25, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0944
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A ring light source system for an interferometer with adjustable ring radius and ring radial width may comprise a laser light source, an expander and collimator optical system, an adjustable aperture, a binary phase grating, a variable-focus optical system, and a spatial filter. The expander and collimator optical system is configured to convert a light beam from the light source into a parallel light beam. The adjustable aperture is configured to adjust a diameter of the parallel light beam. The light beam with the diameter adjusted by the adjustable aperture is incident perpendicularly onto the binary phase grating, followed by the variable-focus optical system. The filter is positioned on a back focal plane of the variable-focus optical system, and is configured to receive a ring light source. The ring radius and radial width of the light source are adjustable by adjusting a focus length f1 of the variable-focus optical system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.