Method for smoothing a solid surface
US8764952B2 · kind B2 · utility
19Cited by
8References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 29, 2004 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | Jun 19, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3151
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a method of irradiating a gas cluster ion beam on a solid surface and smoothing the solid surface, the angle formed between the solid surface and the gas cluster ion beam is chosen to be between 1° and an angle less than 30°. In case the solid surface is relatively rough, the processing efficiency is raised by first irradiating a beam at an irradiation angle θ chosen to be something like 90° as a first step, and subsequently at an irradiation angle θ chosen to be 1° to less than 30° as a second step. Alternatively, the set of the aforementioned first step and second step is repeated several times.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.