Toshio Seki
11Patents
5h-index
19Co-inventors
63Inventor score
Filing activity: Nov 24, 1981 → Nov 4, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4853632A | Apparatus for magnetically detecting a position of a movable magnetic body | Physics | 32 | Expired |
| US4639807A | Magnetic detector having magnetoresistive elements | Physics | 24 | Expired |
| US8764952B2 | Method for smoothing a solid surface | Electricity | 19 | Active |
| US7563379B2 | Dry etching method and photonic crystal device fabricated by use of the same | Electricity | 14 | Expired |
| US8481981B2 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Electricity | 5 | Active |
| US7405394B2 | Gas cluster-ion irradiation apparatus | Electricity | 5 | Active |
| US9881815B2 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Electricity | 2 | Active |
| US8178857B2 | Method and apparatus for flattening solid surface | Electricity | 2 | Active |
| US8268183B2 | Method of processing solid surface with gas cluster ion beam | Electricity | 1 | Active |
| US9663862B2 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Electricity | 1 | Active |
| US8461051B2 | Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.