Patent · US Active

Conductive structures, systems and devices including conductive structures and related methods

US8765598B2 · kind B2 · utility

43Cited by
8References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 2, 2011
Grant dateJul 1, 2014
Priority date
Expiry dateNov 9, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Conductive structures include a plurality of conductive steps and a contact extending at least partially therethrough in communication with at least one of the plurality of conductive steps and insulated from at least another one of the conductive steps. Devices may include such conductive structures. Systems may include a semiconductor device and a stair step conductive structure having a plurality of contacts extending through a step of the stair step conductive structure. Methods of forming conductive structures include forming contacts in contact holes formed through at least one conductive step of a conductive structure. Methods of forming electrical connections in stair step conductive structures include forming contacts in contact holes formed through each step of the stair step conductive structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.