Broadband polarization spectrometer with inclined incidence and optical measurement system
US8767209B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2011 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | May 30, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/21
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample. An optical measurement system including the oblique incidence broadband spectroscopic polarimeter is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.