Patent · US Active

Apparatus and method for analyzing and modifying a specimen surface

US8769709B2 · kind B2 · utility

2Cited by

6References

20Claims

0Family size

Assignee

Carl Zeiss SMS Ltd. · IL

Inventors

Christof Baur · Darmstadt, DE
Klaus Edinger · Lorsch, DE
Thorsten Hofmann · Rodgau, DE
Gabriel Baralia · Darmstadt, DE

Key dates

Filing date	Jul 30, 2013
Grant date	Jul 1, 2014
Priority date	—
Expiry date	Jul 30, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG03F1/82
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.