Optical device, exposure apparatus and laser apparatus
US8773751B2 · kind B2 · utility
1Cited by
7References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2012 |
| Grant date | Jul 8, 2014 |
| Priority date | — |
| Expiry date | Jun 8, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/1643
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
As a spatial light modulator 35 is disposed between a wavelength conversion part 315 and an exit surface 311b in a ferroelectric crystal substrate 31, only zeroth-order light which is at a particular wavelength is guided to a substrate while laser light from the wavelength conversion part 315 is being modulated, whereby a pattern corresponding to LSI data is drawn. Further, the spatial light modulator 35 is disposed together with the wavelength conversion parts 314 and 315 inside the ferroelectric crystal substrate 31.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.