Patent · US Active

Optical device, optical module, and method for manufacturing optical device

US8774571B2 · kind B2 · utility

3Cited by

4References

17Claims

0Family size

Assignee

Oclaro Japan, Inc. · JP

Inventors

Kazunori Shinoda · Tokyo, JP
Shigeki Makino · Kokubunji, JP
Hideo Arimoto · Kokubunji, JP

Key dates

Filing date	Aug 21, 2012
Grant date	Jul 8, 2014
Priority date	—
Expiry date	Oct 31, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01S5/1209
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical device includes a substrate and a first optical waveguide including a mesa. The mesa includes a first lower clad layer portion, a first core layer portion, and a first upper clad layer portion. The first lower clad layer portion, the first core layer portion, and the first upper clad layer portion are disposed in this order from the substrate side. The optical device also includes a first etch stop layer configured to stop etching when the first optical waveguide is formed. The first etch stop layer being laminated over the substrate. The first optical waveguide is laminated on the first etch stop layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.