Patent · US Active

Detecting defects on a wafer

US8775101B2 · kind B2 · utility

64Cited by
260References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 2, 2011
Grant dateJul 8, 2014
Priority date—
Expiry dateJul 5, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/956
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods and systems for detecting defects on a wafer are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.