Inventor · Fremont, CA, US

Stephanie Chen

8Patents
4h-index
20Co-inventors
53Inventor score

Filing activity: Sep 14, 2007 → Nov 24, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US8775101B2 Detecting defects on a wafer Physics 64 Active
US8135204B1 Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe Physics 20 Active
US8000922B2 Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm Physics 11 Active
US8000905B1 Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a wafer Physics 4 Active
US8831334B2 Segmentation for wafer inspection Physics 4 Active
US9715725B2 Context-based inspection for dark field inspection Physics 3 Active
US8049877B2 Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system Physics 1 Active
US12050408B2 Optimization-based image processing for metrology Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.