Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
US8779358B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Apr 18, 2012 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | Apr 23, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2807
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.