Patent · US Active

Aperture unit for a particle beam device

US8779381B2 · kind B2 · utility

0Cited by

4References

19Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Matthias Lang · Berching, DE
Ulrike Zeile · Heidenheim, DE
Michael Albiez · Aalen, DE
Wolfram Buhler · Hermaringen, DE

Key dates

Filing date	Sep 19, 2011
Grant date	Jul 15, 2014
Priority date	—
Expiry date	Mar 1, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/022
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An aperture unit for a particle beam device, in particular an electron beam device, is disclosed. Deposit supporting units are arranged at the aperture unit, with which deposit supporting units contaminations can be bound in such a way that the contaminations can no longer deposit at an aperture opening of the aperture unit. Coatings which can be arranged on the aperture unit make it possible to reduce interactions which cause contaminations to deposit at the aperture opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.