Offset detection and compensation for micromachined inertial sensors
US8783103B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2009 |
| Grant date | Jul 22, 2014 |
| Priority date | — |
| Expiry date | May 24, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5712
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.