Patent · US Active

Semiconductor memory device comprising three-dimensional memory cell array

US8787082B2 · kind B2 · utility

16Cited by
12References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 24, 2012
Grant dateJul 22, 2014
Priority date
Expiry dateAug 24, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A semiconductor memory device includes a substantially planar substrate; a memory string vertical to the substrate, the memory string comprising a plurality of storage cells; and a plurality of elongated word lines, each word line including a first portion substantially parallel to the substrate and connected to the memory string and a second portion substantially inclined relative to the substrate and extending above the substrate, wherein a first group of the plurality of word lines are electrically connected to first conductive lines disposed at a first side of the memory string, and a second group of the plurality of word lines are electrically connected to second conductive lines disposed at a second side of the memory string.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.