Patent · US Active

Apparatus and method for inhibiting propagation of a flame front

US8789616B2 · kind B2 · utility

0Cited by
5References
12Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJul 17, 2006
Grant dateJul 29, 2014
Priority date
Expiry dateDec 23, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/1963
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

Apparatus and a method are provided for inhibiting the propagation of a flame front that is ignited by a pumping mechanism which draws a waste stream from a process chamber. The apparatus comprises a foreline for conveying the waste stream which is drawn from the process chamber to the pumping mechanism. The foreline comprises an isolation valve for selectively isolating the pumping mechanism from the process chamber and a bypass positioned around the isolation valve. The apparatus further comprises a controller for actuating the isolation valve. The controller is configured to cause the isolation valve to be closed when the waste stream is initially drawn from the process chamber. During which time the waste stream is conveyed to the pumping mechanism via the bypass, the bypass comprises means for inhibiting propagation of a flame front therethrough. The controller is also configured to cause the isolation valve to be opened once a pressure within a region upstream of the isolation valve has been reduced below a value at which propagation of a flame front within the waste stream can be sustained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.