Scanner for GCIB system
US8791430B2 · kind B2 · utility
6Cited by
28References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2012 |
| Grant date | Jul 29, 2014 |
| Priority date | — |
| Expiry date | Aug 18, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/20278
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.