Inventor · Danvers, MA, US

Jay Wallace

25Patents
8h-index
33Co-inventors
75Inventor score

Filing activity: Jan 17, 2001 → Oct 17, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7651583B2 Processing system and method for treating a substrate Electricity 535 Expired
US6951821B2 Processing system and method for chemically treating a substrate Chemistry; Metallurgy 276 Expired
US7079760B2 Processing system and method for thermally treating a substrate Electricity 36 Expired
US7029536B2 Processing system and method for treating a substrate Electricity 33 Expired
US6558506B1 Etching system and etching chamber Electricity 28 Expired
US7214274B2 Method and apparatus for thermally insulating adjacent temperature controlled processing chambers Emerging Cross-Sectional Technologies 11 Expired
US7462564B2 Processing system and method for treating a substrate Electricity 9 Active
US7461614B2 Method and apparatus for improved baffle plate Electricity 8 Expired
US7964058B2 Processing system and method for chemically treating a substrate Chemistry; Metallurgy 7 Expired
US8303716B2 High throughput processing system for chemical treatment and thermal treatment and method of operating Electricity 7 Active
US8791430B2 Scanner for GCIB system Electricity 6 Active
US7462243B2 Chemical processing system and method Chemistry; Metallurgy 6 Expired
US8409399B2 Reduced maintenance chemical oxide removal (COR) processing system Electricity 5 Active
US8287688B2 Substrate support for high throughput chemical treatment system Electricity 4 Active
US8323410B2 High throughput chemical treatment system and method of operating Electricity 3 Active
US7083161B2 Method and apparatus for providing vacuum isolation Emerging Cross-Sectional Technologies 1 Expired
US8115140B2 Heater assembly for high throughput chemical treatment system Electricity 1 Active
US6695318B2 Electronic device processing equipment having contact gasket between chamber parts Electricity 1 Expired
US9865433B1 Gas injection system for ion beam device Electricity 1 Active
US11948781B2 Apparatus and system including high angle extraction optics Electricity 0 Active
US11361935B2 Apparatus and system including high angle extraction optics Electricity 0 Active
US12191117B2 Compact low angle ion beam extraction assembly and processing apparatus Electricity 0 Active
US11495430B2 Tunable extraction assembly for wide angle ion beam Electricity 0 Active
US12106943B2 Substrate halo arrangement for improved process uniformity Electricity 0 Active
US10062548B2 Gas injection system for ion beam device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.