Jay Wallace
25Patents
8h-index
33Co-inventors
75Inventor score
Filing activity: Jan 17, 2001 → Oct 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7651583B2 | Processing system and method for treating a substrate | Electricity | 535 | Expired |
| US6951821B2 | Processing system and method for chemically treating a substrate | Chemistry; Metallurgy | 276 | Expired |
| US7079760B2 | Processing system and method for thermally treating a substrate | Electricity | 36 | Expired |
| US7029536B2 | Processing system and method for treating a substrate | Electricity | 33 | Expired |
| US6558506B1 | Etching system and etching chamber | Electricity | 28 | Expired |
| US7214274B2 | Method and apparatus for thermally insulating adjacent temperature controlled processing chambers | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7462564B2 | Processing system and method for treating a substrate | Electricity | 9 | Active |
| US7461614B2 | Method and apparatus for improved baffle plate | Electricity | 8 | Expired |
| US7964058B2 | Processing system and method for chemically treating a substrate | Chemistry; Metallurgy | 7 | Expired |
| US8303716B2 | High throughput processing system for chemical treatment and thermal treatment and method of operating | Electricity | 7 | Active |
| US8791430B2 | Scanner for GCIB system | Electricity | 6 | Active |
| US7462243B2 | Chemical processing system and method | Chemistry; Metallurgy | 6 | Expired |
| US8409399B2 | Reduced maintenance chemical oxide removal (COR) processing system | Electricity | 5 | Active |
| US8287688B2 | Substrate support for high throughput chemical treatment system | Electricity | 4 | Active |
| US8323410B2 | High throughput chemical treatment system and method of operating | Electricity | 3 | Active |
| US7083161B2 | Method and apparatus for providing vacuum isolation | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8115140B2 | Heater assembly for high throughput chemical treatment system | Electricity | 1 | Active |
| US6695318B2 | Electronic device processing equipment having contact gasket between chamber parts | Electricity | 1 | Expired |
| US9865433B1 | Gas injection system for ion beam device | Electricity | 1 | Active |
| US11948781B2 | Apparatus and system including high angle extraction optics | Electricity | 0 | Active |
| US11361935B2 | Apparatus and system including high angle extraction optics | Electricity | 0 | Active |
| US12191117B2 | Compact low angle ion beam extraction assembly and processing apparatus | Electricity | 0 | Active |
| US11495430B2 | Tunable extraction assembly for wide angle ion beam | Electricity | 0 | Active |
| US12106943B2 | Substrate halo arrangement for improved process uniformity | Electricity | 0 | Active |
| US10062548B2 | Gas injection system for ion beam device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.