Patent · US Active

Ion beam sample preparation apparatus and methods

US8791438B2 · kind B2 · utility

1Cited by

15References

20Claims

0Family size

Assignee

GATAN, INC. · US

Inventors

Steven Thomas Coyle · Alameda, US
John Andrew Hunt · Fremont, US
Michael Patrick Hassel-Shearer · Watlington, GB

Key dates

Filing date	Jul 24, 2013
Grant date	Jul 29, 2014
Priority date	—
Expiry date	Jul 24, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31745
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.