Nitrile and amidoxime compounds and methods of preparation for semiconductor processing

US8802609B2 · kind B2 · utility

Assignee

• EKC Technology, Inc. · US

Inventors

• Wai Mun Lee · Fremont, US
• Hua Cui · Beijing, CN
• Mark A. Scialdone · Wilmington, US
• Albert G. Anderson · Wilmington, US

Key dates

• Filing date: Jan 19, 2012
• Grant date: Aug 12, 2014
• Expiry date: Jan 30, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02057
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Semiconductor processing compositions comprising amidoxime compounds having two or more amidoxime functional groups and their use in semiconductor processing to remove photoresist, polymeric materials, etching residues and copper oxides from semiconductor substrates, particularly substrates comprising copper, low-k dielectric material, titanium nitride, and/or titanium oxynitride.