Semiconductor high-speed integrated electro-optic devices and methods
US8805130B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2011 |
| Grant date | Aug 12, 2014 |
| Priority date | — |
| Expiry date | Nov 4, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/15
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Novel integrated electro-optic structures such as modulators and switches and methods for fabrication of the same are disclosed in a variety of embodiments. In an illustrative embodiment, a device includes a substrate with a waveguide and an optical resonator comprising polycrystalline silicon positioned on the substrate. First and second doped semiconducting regions also comprise polycrystalline silicon and are positioned proximate to the first optical resonator. The first optical resonator is communicatively coupled to the waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.