Scanning electron microscope
US8809782B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2010 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Oct 2, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0216
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.