Positioning method for an optical arrangement of a projection illumination system

US8810934B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Karl-Eugen Aubele · Geislingen an der Steige, DE
• Erich Merz · Oberkochen, DE
• Thorsten Rassel · Wertingen, DE

Key dates

• Filing date: Mar 17, 2011
• Grant date: Aug 19, 2014
• Expiry date: Aug 30, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70525
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present disclosure relates to a method for the production and/or adjustment of an optical arrangement of a projection illumination system, in which at least one actuator is used to set the position of at least one optical element to be manipulated by moving the optical element incrementally with a specific increment size. The increment size of the movement increments is set as a function of the distance of the optical element from the desired position, with the distance being represented by a distance value. If the distance value is above a first threshold value, a substantially constant increment size is set, while the specific increment size decreases as the distance from the desired position decreases if the distance value is below the first threshold value. Alternatively or additionally, a pre-specified deviation from the specific increment size and/or from a pre-specified increment size change rate results in a warning signal and/or ceasing of the movement.