Scanning probe microscope
US8813261B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2013 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Aug 23, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope including: a scanning probe microscope unit section including, a cantilever having a probe, a cantilever holder configured to fix the cantilever, a sample holder on which a sample is configured to be placed, a horizontal fine transfer mechanism configured to relatively scan a surface of the sample with the probe, a vertical fine transfer mechanism configured to control a distance between the probe and the sample surface, an optical microscope configured to observe the cantilever and the sample; a control device; an imaging device to which a viewing field, wider than that of the optical microscope and capable of observing the cantilever and the sample at the same time, can be set; and an image display device configured to display images observed by the optical microscope and the imaging device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.