Patent · US Active

Apparatus and method for producing microcomponents and use of

US8815746B2 · kind B2 · utility

0Cited by

5References

7Claims

0Family size

Assignee

R3T GmbH Rapid Reactive Radicals Technology · DE

Inventor

Josef Mathuni · Munich, DE

Key dates

Filing date	Aug 30, 2012
Grant date	Aug 26, 2014
Priority date	—
Expiry date	Aug 30, 2032

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/032
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.