Charged particle beam apparatus having noise absorbing arrangements
US8822952B2 · kind B2 · utility
8Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2011 |
| Grant date | Sep 2, 2014 |
| Priority date | — |
| Expiry date | Oct 14, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0216
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.