Large area dissolvable template lithography
US8828298B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 21, 2013 |
| Grant date | Sep 9, 2014 |
| Priority date | — |
| Expiry date | Apr 6, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/17
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method and system for patterning a substrate are provided. A template is formed by applying a precursor material to a patterned master substrate and curing or solidifying the precursor material. The template is detached from the master substrate using a carrier having a curved surface. The template is coated with a patterning material, and is then detached from the carrier and applied to the substrate to be patterned. The template is then dissolved without affecting the patterning material, and the patterning material may thereafter be finished to develop the pattern. In an alternate embodiment, the patterning material may be applied to the substrate and then imprinted using the template.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.