Actuator, lithographic apparatus, and actuator constructing method
US8830020B2 · kind B2 · utility
1Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2010 |
| Grant date | Sep 9, 2014 |
| Priority date | — |
| Expiry date | Jun 9, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An actuator includes a coil; a cooling body configured to cool the coil; a quantity of heat transfer material fixedly arranged between the cooling body and the coil, and a mechanical attacher configured to attach the coil to the cooling body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.