Imprinting machine and device manufacturing method
US8834144B2 · kind B2 · utility
9Cited by
39References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2010 |
| Grant date | Sep 16, 2014 |
| Priority date | — |
| Expiry date | May 6, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7049
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.