Hirohisa Ota
17Patents
5h-index
13Co-inventors
63Inventor score
Filing activity: Jun 29, 1995 → Feb 19, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7815424B2 | Imprinting machine and device manufacturing method | Physics | 13 | Active |
| US7180575B2 | Exposure apparatus and device manufacturing method | Physics | 11 | Expired |
| US5614787A | Metal halide lamp having heat dam portion | Electricity | 9 | Expired |
| US8834144B2 | Imprinting machine and device manufacturing method | Physics | 9 | Active |
| US7381272B2 | Processing apparatus | Performing Operations; Transporting | 6 | Active |
| US10965201B2 | Transport system, processing system and manufacturing method of article | Electricity | 5 | Active |
| US7789647B2 | Processing apparatus and method | Performing Operations; Transporting | 5 | Active |
| US7815425B2 | Processing apparatus | Performing Operations; Transporting | 5 | Expired |
| US7807065B2 | Processing method | Performing Operations; Transporting | 5 | Active |
| US7690912B2 | Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same | Performing Operations; Transporting | 3 | Active |
| US7233383B2 | Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration | Physics | 2 | Expired |
| US7846346B1 | Processing apparatus and method | Performing Operations; Transporting | 2 | Active |
| US8616874B2 | Pattern transferring apparatus and pattern transferring method | Physics | 2 | Active |
| US7236231B2 | Exposure apparatus and device manufacturing method | Physics | 1 | Expired |
| US8393885B2 | Processing apparatus | Performing Operations; Transporting | 0 | Active |
| US7196321B2 | Fine pattern forming apparatus and fine pattern inspecting apparatus | Physics | 0 | Expired |
| US11929655B2 | Transport system and processing system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.