Microfluidic device with multilayer coating
US8840981B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 9, 2011 |
| Grant date | Sep 23, 2014 |
| Priority date | — |
| Expiry date | Oct 14, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A microfluidic device comprised of a material layer and a fluid transport feature having at least one characteristic dimension of less than 500 micrometers formed in or on the material layer. A chemically resistant, thermally stable and biocompatible multilayer coating is provided onto and in contact with the microfluidic device, wherein the multilayer coating includes one or more thin film layers comprised primarily of hafnium oxide or zirconium oxide and one or more thin film layers comprised primarily of tantalum oxide, the multilayer coating being located on a surface of the fluid transport feature. The corrosion resistant film can be formed on the surfaces of fluid transport features of microfluidic devices using atomic layer deposition film forming methods that produce conformal films that cover complex geometries, thereby enabling the corrosion resistant film to be formed on all surfaces of the fluid transport features of the microfluidic device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.