Inspection tool and methodology for three dimensional voltage contrast inspection
US8841933B2 · kind B2 · utility
2Cited by
12References
12Claims
0Family size
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Key dates
| Filing date | Sep 9, 2010 |
| Grant date | Sep 23, 2014 |
| Priority date | — |
| Expiry date | Jul 24, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T7/0004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for improved voltage contrast inspection is disclosed. In one embodiment the temporal response to voltage contrast is considered to find an optimal acquisition time. In another embodiment, multiple optimal acquisition times are identified. The identified acquisition times are used in voltage contrast inspection of semiconductor fabrication, and are well-suited to SOI technology.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.