Apparatus and method for detecting optical profile
US8842292B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2011 |
| Grant date | Sep 23, 2014 |
| Priority date | — |
| Expiry date | Sep 22, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.