Patent · US Active

Thermal controller for electronic devices

US8844612B2 · kind B2 · utility

2Cited by
9References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 29, 2008
Grant dateSep 30, 2014
Priority date
Expiry dateOct 10, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2874
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus is provided for controlling a temperature of a device by circulating fluid through a heat sink in thermal contact with the device. The apparatus includes a first fluid source (505) including a first fluid having a first temperature, a second fluid source (510) including a second fluid having a second temperature, and a thermal chuck (500) operably connected to the first fluid source and the second fluid source, wherein the thermal chuck is configured to receive the first fluid and the second fluid to be circulated through the heat sink (555). A method is also provided for controlling a temperature of a device in contact with a heat sink. The method includes determining a target temperature (S602), initiating a flow of a fluid from a fluid source (S604, S702), determining temperature data (S606, S704) of the device and the heat sink, and variably adjusting a flow rate (S710, S712) of the fluid to generally maintain the device at the target temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.