Patent · US Active

LED-based photolithographic illuminator with high collection efficiency

US8845163B2 · kind B2 · utility

2Cited by

20References

13Claims

0Family size

Assignee

Ultratech · US

Inventors

David G. Stites · St. Petersburg, US
Andrew M. Hawryluk · Los Altos, US

Key dates

Filing date	Aug 17, 2012
Grant date	Sep 30, 2014
Priority date	—
Expiry date	Jun 21, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH10H20/8582
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An LED-based photolithographic illuminator with high collection efficiency is disclosed. The illuminator utilizes an array of LEDs, wherein each LED has an LED die and a heat sink. The LED dies are imaged onto the input end of a homogenizer rod to substantially cover the input end without inclusion of the non-light-emitting heat sink sections of the LED. A microlens array is used to image the LED dies. The collection efficiency of the illuminator is better than 50% and the illumination uniformity at the output end of the light homogenizer is within +/−2%.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.