Micromechanical component having an inclined structure and corresponding manufacturing method

US8847336B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Tjalf Pirk · Stuttgart, DE
• Stefan Pinter · Reutlingen, DE
• Hubert Benzel · Neckartenzlingen, DE
• Heribert Weber · Leverkusen, DE
• Michael Krueger · Littleton, US
• Robert Sattler · Grosse Pointe Shores, US
• Frederic Njikam Njimonzie · Reutlingen, DE
• Joerg Muchow · Reutlingen, DE
• Joachim Fritz · Rötteln, DE
• Christoph Schelling · Stuttgart, DE
• Christoph Friese · Reutlingen, DE

Key dates

• Filing date: Nov 28, 2008
• Grant date: Sep 30, 2014
• Expiry date: Sep 2, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0307
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.