Heat exchange pedestal with coating of diamond-like material
US8852348B2 · kind B2 · utility
12Cited by
45References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2010 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Oct 1, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate heat exchange pedestal comprises: (i) a support structure having a contact surface comprising a coating of a diamond-like material, and (ii) a heat exchanger in the support structure, the heat exchanger capable of heating or cooling a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.