Graphene pressure sensors
US8852985B2 · kind B2 · utility
13Cited by
1References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 31, 2012 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Aug 31, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Semiconductor nano pressure sensor devices having graphene membrane suspended over open cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.