Method of fabricating solar cell

US8852990B2 · kind B2 · utility

Assignee

• UNITED MICROELECTRONICS CORP. · TW

Inventors

• Wei-Lin Chen · Ellicott City, US
• Chih-Chung Wang · Zhuolan Township, TW
• Chiu-Te Lee · Hengshan, TW
• Ke-Feng Lin · Lo Wu, CN

Key dates

• Filing date: Aug 20, 2012
• Grant date: Oct 7, 2014
• Expiry date: Aug 21, 2032

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50

Abstract

A method of fabricating a solar cell includes the following steps. At first, a substrate including a doped layer is provided. Subsequently, a patterned material layer partially overlapping the doped layer is formed on the substrate, and a first metal layer is conformally formed on the patterned material layer and the doped layer. Furthermore, a patterned mask layer totally overlapping the patterned material layer is formed on the first metal layer, and a second metal layer is formed on the doped layer not overlapped by the patterned material layer. Then, the patterned mask layer, the first metal layer between the patterned mask layer and the patterned material layer and a part of the patterned material layer are removed.