Integrated circuits separated by through-wafer trench isolation
US8853816B2 · kind B2 · utility
4Cited by
3References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2012 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Dec 5, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An isolated semiconductor circuit comprising: a first sub-circuit and a second sub-circuit; a backend that includes an electrically isolating connector between the first and second sub-circuits; a lateral isolating trench between the semiconductor portions of the first and second sub-circuits, wherein the lateral isolating trench extends along the width of the semiconductor portions of the first and second sub-circuits, wherein one end of the isolating trench is adjacent the backend, and wherein the isolating trench is filled with an electrically isolating material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.