Patent · US Active

Air-release features in cavity packages

US8853839B2 · kind B2 · utility

65Cited by
8References
53Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 4, 2012
Grant dateOct 7, 2014
Priority date
Expiry dateOct 4, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19107
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A housing for integrated devices that includes an air-release mechanism is disclosed. This is achieved, in various embodiments, by forming a vent hole in a package substrate, and arranging a package lid over the package substrate. The vent hole allows air to be released from within the cavity package, thereby ensuring that the package lid remains stably affixed to the package substrate despite increased temperatures during processing. The vent hole may be sealed upon mounting the package onto a mounting substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.