Patent · US Active

Integrated chemical sensor

US8860152B2 · kind B2 · utility

12Cited by

16References

22Claims

0Family size

Assignee

STMICROELECTRONICS PTE LTD · SG

Inventors

Suman Cherian · Thrissur, IN
Olivier Le Neel · Marigot, FR

Key dates

Filing date	Oct 31, 2011
Grant date	Oct 14, 2014
Priority date	—
Expiry date	Nov 8, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T436/205831
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A integrated circuit die includes a chemical sensor, a thermal sensor, and a humidity sensor formed therein. The chemical sensor, thermal sensor, and humidity sensor include electrodes formed in a passivation layer of the integrated circuit die. The integrated circuit die further includes transistors formed in a monocrystaline semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.