Laser assisted device alteration using two-photon absorption
US8860447B2 · kind B2 · utility
6Cited by
6References
12Claims
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Key dates
| Filing date | Sep 8, 2011 |
| Grant date | Oct 14, 2014 |
| Priority date | — |
| Expiry date | Nov 10, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Two-Photon Laser Assisted Device Alteration technique is presented. Fault localization is investigated by exploiting the non-linear two-photon absorption mechanism to induce LADA effects. Femtosecond laser pulses of wavelength having photon energy lower than the silicon bandgap are directed at the area of interest, while the DUT is stimulated with test vectors. The laser pulses are synchronized to the DUT stimulation, so that switching timing can be altered using the two-photon absorption effect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.